International Chemical Safety Cards NITROGEN TRIFLUORIDE ICSC: 1234 NITROGEN TRIFLUORIDE Nitrogen fluoride Trifluoroamine Trifluoroammonia Perfluoroammonia (cylinder) NF3 Molecular mass: 71.0 CAS # 7783-54-2 RTECS # QX1925000 ICSC # 1234 UN # 2451 (compressed) TYPES OF HAZARD/ EXPOSURE ACUTE HAZARDS/ SYMPTOMS PREVENTION FIRST AID/ FIRE FIGHTING FIRE Not combustible but enhances combustion of other substances. Gives off irritating or toxic fumes (or gases) in a fire. NO contact with flammable substances. In case of fire in the surroundings: all extinguishing agents allowed. EXPLOSION In case of fire: keep cylinder cool by spraying with water. Combat fire from a sheltered position. EXPOSURE INHALATION Ventilation. Fresh air, rest. SKIN First rinse with plenty of water, then remove contaminated clothes and rinse again. EYES Safety goggles. INGESTION SPILLAGE DISPOSAL STORAGE PACKAGING & LABELLING Ventilation. NEVER direct water jet on liquid (extra personal protection: self-contained breathing apparatus). Fireproof if in building. Separated from combustible and reducing substances. Cool. UN Hazard Class: 2.3 UN Subsidiary Risks: 5.1 SEE IMPORTANT INFORMATION ON BACK ICSC: 1234 Prepared in the context of cooperation between the International Programme on Chemical Safety & the Commission of the European Communities © IPCS CEC 1993 No modifications to the International version have been made except to add the OSHA PELs, NIOSH RELs and IDLH values.

International Chemical Safety Cards NITROGEN TRIFLUORIDE ICSC: 1234 I M P O R T A N T D A T A PHYSICAL STATE; APPEARANCE: COLOURLESS GAS , WITH CHARACTERISTIC ODOUR. PHYSICAL DANGERS: CHEMICAL DANGERS: The substance decomposes on heating or on burning producing toxic fumes including fluoride. The substance is a strong oxidant and reacts with combustible and reducing materials. Reacts violently with ammonia, carbon monoxide, diborane, hydrogen, hydrogen sulfide, methane or tetrafluorohydrazine, causing explosion hazard. OCCUPATIONAL EXPOSURE LIMITS (OELs): TLV: 10 ppm; 29 mg/m3 (as TWA) (ACGIH 1995-1996). ROUTES OF EXPOSURE: The substance can be absorbed into the body by inhalation. INHALATION RISK: A harmful concentration of this gas in the air will be reached very quickly on loss of containment. EFFECTS OF LONG-TERM OR REPEATED EXPOSURE: The substance may have effects on the liver and kidneys. PHYSICAL PROPERTIES Boiling point: -129°C Melting point: -208.5°C Relative density (water = 1): see Notes Solubility in water: none Vapour pressure, kPa at °C: see Notes ENVIRONMENTAL DATA N O T E S Vapor pressure is >1 atm at 20°C. Density of the liquid at boiling point: 1.885 kg/l. The odour warning when the exposure limit value is exceeded is insufficient. Methemoglobinemia has been observed in animals, but relevance to humans is unclear. Turn leaking cylinder with the leak up to prevent escape of gas in liquid state. Transport Emergency Card: TEC (R)-20G02 ADDITIONAL INFORMATION ICSC: 1234 NITROGEN TRIFLUORIDE © IPCS, CEC, 1993

IMPORTANT LEGAL NOTICE: Neither NIOSH, the CEC or the IPCS nor any person acting on behalf of NIOSH, the CEC or the IPCS is responsible for the use which might be made of this information. This card contains the collective views of the IPCS Peer Review Committee and may not reflect in all cases all the detailed requirements included in national legislation on the subject. The user should verify compliance of the cards with the relevant legislation in the country of use. The only modifications made to produce the U.S. version is inclusion of the OSHA PELs, NIOSH RELs and IDLH values.